Udeshi T., Parker E.
Zyvex Corporation, US
Keywords: 3D modeling, mesh generation, TCAD, voxel algorithms
We present novel voxel-based algorithms and their application to Micro Electro Mechanical System (MEMS) design and simulation. Voxel-based techniques are known for their robustness and flexibility and have been used for MEMS design and simulation. However, they have several problems:-1. Memory inefficient: Since voxels discretize space, this representation is memory-intensive. 2. Computationally Expensive: Any operation performed on the voxels requires visiting a large number of them, thus increasing computational cost. 3. Visualization: Isosurface extraction is required for visualizing the surface. Standard isosurface extraction algorithms are computationally expensive and yield a large number of surface triangles. 4. Finite Element Mesh Generation: Hitherto there has been very little work done on mesh generation directly from voxels. Most mesh generation algorithms need a surface representation of the geometry. In this paper, we describe how we tackle all these shortcomings, with novel algorithms and data structures which have been implemented in the PC-based MEMulator tool. We also introduce the MEMulator’s Python-based interface and the operations supported
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Pages: 480 - 483
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-1-7