Souchon F., Koszewski A., Levy D., Charvet PL.
CEA/LETI/MINATEC, FR
Keywords: gap height, mechanical model, MEMS, nanoindentation, stiffness
The paper presents a methodology with nanoindentation experiments to characterize the mechanical properties of MEMS switches. After that, simple analytical models for mechanical and electrostatic aspects are used to validate these mechanical characterizations. At the end, the electrostatic behavior of switches are well-understood thanks to the mechanical charaterizations.
Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: June 1, 2008
Pages: 885 - 888
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 978-1-4200-8503-7