Low-Latency Analog Processors for Performance Control of MEMS

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Towards faster feedback response for controlling the performance of microelectromechanical systems (MEMS), we present the first use of the mathematical processing properties of bipolar junction transistors (BJT) for such control. This concerns a type of feedback control called performance-on-demand MEMS (PODMEMS), where the movement of the proof mass is monitored, and a feedback force is applied that is proportional to its displacement, velocity, and acceleration, which increases or decreases the system’s effective stiffness, damping, or mass. A low- latency feedback response is necessary for stability. In our prior work we proposed the use of opamp-based electronics, which yielded a latency of 50 nanoseconds, which is adequate for systems that operate at hundreds of kHz or less. But for systems that operate at higher rates, lower latency is desired. In this paper we show how the latency can be reduced by an order of magnitude by using the mathematical properties of BJTs.

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Journal: TechConnect Briefs
Volume: TechConnect Briefs 2019
Published: June 17, 2019
Pages: 334 - 337
Industry sector: Sensors, MEMS, Electronics
Topicss: Nanoelectronics, Sensors - Chemical, Physical & Bio
ISBN: 978-0-9988782-8-7