Veryovkin I.V., Baryshev S.V., Zinovev A.V., Tripa C.E., Peng Q., Elam J.W., Pellin M.J.
Argonne National Laboratory, US
Keywords: depth resolution, lateral resolution, three dimensional mass spectrometry
Depth resolution on the order of a few atomic layers has been demonstrated by initial tests of the dual beam sputter depth profiling with the SARISA laser post-ionization secondary neutral mass spectrometry instrument, which was applied to characterize a stack of 16 alternating MgO/ZnO layers grown by atomic layer deposition on Si substrate. At the conference, these results will be presented together with results of lateral resolution tests, currently under way, and discussed in view of three-dimensional mass spectrometry on nanometer scale.
Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2011: Advanced Materials, CNTs, Particles, Films and Composites
Published: June 13, 2011
Pages: 24 - 27
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 978-1-4398-7142-3