Seter D.J., Degani O., Kaldor S., Scher E., Nemirovsky Y.
RAFAEL Microsystems Group, IL
Keywords: angular pull-in, dynamics, microgyroscopes, simulations, squeeze film
When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a relatively simple approach is presented for the study of the dynamics of microdevices. The theoretical derivation of the equations of motion is based on the Newton-Euler approach and provides a matrix form that is convenient to integrate. The dynamical model combined with models for electrostatic actuation and squeeze film effects [2] is verified by comparison with experimental results: the decaying motion of a microresonator due to an electrostatic impulse. Good agreement between simulation and measurements is shown. The pull-in angle and voltage are simulated and compared to theoretical calculations that were presented by the authors [3]. Finally, the model is used for parametric study of the influence of geometrical variations on the dynamics of a microgyroscope.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 158 - 161
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0