Wilson N.M., Pinsky P.M., Dutton R.W.
Stanford University, US
Keywords: finite element analysis, micro-electro-mechanical systems (MEMS), tetrahedral elements, unstructured meshes
Simulation of micro-electro-mechanical systems (MEMS) typically involves the requirement to mesh complex 3-D representations of the geometry. Since proper manual or semi-automated mesh generation requires significant user time and knowledge, there is great interest in automating this tedious and error prone process. There are two key technical issues. First, a software package must be capable of automatically generating a mesh. Secondly, the solver must be able to ìadjustî the mesh according to the error in the solution to achieve a result which is useful to the designer. This paper starts with a survey of the current state-of-the-art in meshing software, and then it discusses the connection between element choice, mesh quality, and the accuracy of the simulation results.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 305 - 308
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6