Weiss E., Welp E.G., Witzel U., Wieck A., Schmidt E.
Ruhr University Bochum, DE
Keywords: diaphragm, FEM computation membrane, finite element method, micromechanics, standardization
Although certain components (such as diaphragms or beams) are used recurrently in micromechanics, the degree of standardization of components that is familiear in classic mechanical engineering is still to a great extent unknown in this field. This is due in part to the scope of MEMS for integrating the mechanics and the (evaluation) electronics together on a single chip (monolithic integration). This paper presents a form of standardization of micromechanical components, using micromechanical diaphragms as an illustration. This involves defining various diaphragm sizes and shapes as standard, and adapting them to individual tasks by modifying them with specific additional elements. This modular principle permits standardization despite monolithic integrations.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 366 - 369
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-0-4