In-Plane Transduction of Nanomechanical Microcantilever Motion To Enable Sensor Arrays

, , , ,
,

Keywords: ,

We have recently introduced a new microcantilever transduction mechanism that is designed to scale to large arrays on a single chip while maintaining a very compact form factor and high sensitivity. It is based on an in-plane photonic approach that uses differential optical detection. In this paper we discuss our new approach and experimental demonstration of its fundamental elements.

PDF of paper:


Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: May 20, 2007
Pages: 194 - 197
Industry sector: Medical & Biotech
Topic: Diagnostics & Bioimaging
ISBN: 1-4200-6183-6