Zubert M., Napieralska M., Napieralski A., Noullet J.L.
Technical University of Lodz, PL
Keywords: MEMS, mono-dimensional model, over-heated actuator, polycrystalline silicon parameters, RESCUER software
A mono-dimensional model of an over heated actuator is presented in this paper. The proposed distributed models are derived based on real physical phenomena described by multi-dimensional partial differential equations. The proposed model has been prepared taking into account real polycrystalline silicon parameters and their thermal dependencies. The considerations are based on the previous device analysis and FEM simulation for the device operating in real working conditions in static and quasi-static mode.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Pages: 359 - 362
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-8-4