Ben Azouz A., Brabazon D., Vázquez M., Macka M.
Dublin City University, IE
Keywords: Chemical detection, glasses, micro fluidics, micro-channel, pulsed CO2 laser
Traditional techniques to manufacture micro-fluidic devices are well established but most are limited to surface micro-fabrication. Laser micro-machining provides an alternative technique for micro-fabrication of devices. This paper presents the fabrication of 3-D micro-channel structures with four different types of glass, soda-lime, fused-silica, borosilicate and quartz. Results showed that quartz and fused-silica glasses provided better channel topologies for chemical sensing applications.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 21, 2010
Pages: 496 - 499
Industry sector: Sensors, MEMS, Electronics
Topic: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 978-1-4398-3402-2