Kudo H., Nakamura T., Arakawa T., Ohtsuka S., Izumi T., Shoji S., Sato H., Kobayashi H., Mori K., Morita U., Homma T., Osaka T., Mitsuda K., Yamasaki N.Y., Fujimoto R., Iyomoto N., Oshima T., Futamoto K., Takei Y., Ichitsubo T., Fujimori T., Ishisaki Y., Morita U., Ohashi T., Kuroda Y., Onishi M., Otake K.
Waseda University, JP
Keywords: calorimeter, MEMS, thermal sensor, X-ray
We are developing a multi-pixel x-ray microcalorimeters in order to realize good energy resolution x-ray imaging for future Japanese X-ray astronomy missions. The energy resolutions of 10eV at 6keV and 32×32 pixels of arrayed x-ray microcalorimeters are required for this purpose. The advantages of x-ray microcalorimeters are clear compared with common x-ray sensors. The most popular x-ray imaging spectrometer is an x-ray CCD. The energy resolution of an x-ray CCD is theoretically limited to ~120eV at 6keV. A grating is usually used as a good energy resolution spectrometer particularly below 1~2eV. However the efficiency of the grating is poor. An x-ray microcalorimeter is fabricated and tested. A superconducting phase transition edge sensor is applied for the x-ray microcalorimeter. The energy resolution of 34 eV at 6keV incident x-ray photon is obtained under 151mk of operating temperature. Details of the x-ray microcalorimeter, signal processing and the latest progress will be presented.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Pages: 436 - 439
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-0-9