Hausser F., Voigt A.
Research Center Caesar, DE
Keywords: adaptive finite elements, anisotropy, homoepitaxy, step flow model, thermal relaxation
The thermal relaxation of isolated (single layer) homoepitaxial islands and craters and of isolated nanomounds is simulated using a 2+1 dimensional step flow model. Numerical simulations based on adaptive finite elements are used to study the decay rates of these structures in the diffusion limited and the attachment- detachment limited regime under the influence of anisotropic effects.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Pages: 462 - 465
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Informatics, Modeling & Simulation
ISBN: 0-9728422-8-4