Lyshevski S.E.
Rochester Institute of Technology, US
Keywords: axial topology microservos, MEMS, microactuators, microsystems
Concurrent microsystems design, optimization, data-intensive analysis and hardware-software co-design of digital high-performance microelectromechanical systems (MEMS) have become major challenging themes. The major goal of this paper is to report-and-apply viable methodologies for design–and–implementation of MEMS hardware, microscale axial topology actuator developments, control system design, testing, and, characterization. We examined a miniscale servosystem with axial-topology high-torque density actuators with SmCo permanent-magnet strip arrays. This servo must guarantee high-precision with imposed requirements and specification on the dynamic performance, such as stability, robustness, settling time, overshoot, etc.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 13, 2011
Pages: 361 - 364
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4398-7139-3