Cheon J-H, Lin Q., Kong B-D, Kang D.W., Kim L., Suh J.S., Park Y.J., Min H.S.
Seoul National University, KR
Keywords: biological sensor, carbon nanotubes
In this paper, an Electrolyte-CNTs-Insulator-Semiconductor capacitor has been prepared due to compatibility with CMOS technology. To prepare this capacitor, we used the bonding technique to combine the MWNT array.It shows that the surface potential modulation occurs in the semiconductor region at a certain potential so electrolyte can act as a well functional liquid gate.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: May 8, 2005
Pages: 464 - 465
Industry sectors: Medical & Biotech | Sensors, MEMS, Electronics
Topics: Biomaterials, Chemical, Physical & Bio-Sensors