Lim M., Daneman M.
InvenSense, US
Keywords: fabless MEMS CMOS-MEMS
InvenSense, a fabless MEMS company has successfully transferred its proprietry fabriction process has been to multiple foundries to support high volume production of multiple products. The process supports CMOS electronics integration and incorporates wafer level packaging. These advances to the state of MEMS manufacturing provides fabless MEMS companies an alternative to a costly and time consuming process development cycle and a direct path to high volume production.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 168 - 171
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4665-6275-2