Thompson W., Notte J., Scipioni L., Ananth M., Stern L., Sijbrandij S., Sanford C.
Carl Zeiss SMT, US
Keywords: graphene, helium ion microscopy, soft materials collagen fibers, sub-nanometer image resolution
The helium ion microscope routinely obtains sub-nanometer resolution on uncoated soft materials with a high signal to damage ratio. In addition to its high resolution imaging capability, the microscope has been successful at sub-nanometer film thickness determination, the patterning of 5 nm free standing graphene wires and the ion induced deposition of a 30nm, 6 micron high, free standing tungsten pillar. We will discuss the microscope and these various recent applications.
Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites
Published: June 21, 2010
Pages: 25 - 28
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 978-1-4398-3401-5