Chaudhary A., van Amerom F.H.W., Bhansali S., Short R.T.
University of South Florida, US
Keywords: cylindrical ion trap, green tapes, miniaturization
This work concentrates on a novel technique for the fabrication of miniaturized cylindrical ion trap structures (CIT) to be used as replacements of commercial hyperbolic structure ion trap mass spectrometers. Low temperature co-fired ceramic (LTCC) tapes (Dupont 951), commonly known as green tape, were used to fabricate a CIT structure of 2.75 mm in diameter. The fabrication process included a stainless steel die, which was used to obtain the impressions, for automatic alignment of stainless steel end plates. The ring electrode structure made out of green tape and the stainless steel endplates, were plated with electro-less Ni and electro-less Au to obtain a conducting surface. The green tape CIT structures were tested for background contamination and out-gassing under vacuum in a Saturn 2000 MS Mass Spectrometer. Experiments showed that no considerable out-gassing or contamination is present at pressures of 10-4 to 10-6 Torr. Other techniques to fabricate CIT structure involving green tapes are being explored as an alternative.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Pages: 371 - 373
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-7-6