A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

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A novel and practical method is developed to resolve the three dimensional Poisson’s and Laplace’s equation at the center axis in cylindrical coordinates. The method employs the rectangular xyz co-ordinates to solve the potential f along the center axis. The new approach is tested by comparing the potential distribution of a biased cylindrical duct simulated by two dimensional l’Hospital rule. The capability of the method to model non-symmetry field structure is verified by simulating the potential distribution inside the cylindrical duct with only a three quarter of the wall biased with a positive voltage.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 505 - 508
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0