A Nanoscale Electromechanical Contact Switch for Logic Applications


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Here, we describe the operation of a nano-electro-mechanical contact switch. The switch design relies on a sharp contact tip integrated to a compliant nanomechanical beam. When the beam is actuated electrostatically, the tip establishes intimate electrical contact between two electrodes. A preliminary contact switch was fabricated on a Si3N4 membrane using optical lithography, electron beam lithography and reactive ion etching. Its quasi-static operation was subsequently demonstrated.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: March 7, 2004
Pages: 187 - 189
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Nanoelectronics
ISBN: 0-9728422-9-2