Kamon M., Nguyen A-M., Gilbert J.R.
Microcosm Technologies, Inc., US
Keywords: eddy currents, integral equation, magnetic sensor, simulation
This paper describes using 3D integral equation based simulation in combination with simulation managment to provide a design tool for an eddy-current inductive position and speed sensor under development at CSEM Microsystems. Both the frequency dependence and the position dependence of the inductance is explored to understand the operation and sensitivity of the sensor. The frequency dependence of the inductance can be captured in a low order model which can be used for higher level system simulation.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 313 - 317
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6