A Data Model for the Representation of Fabrication Dependencies Concerning Micromechanical Devices

Hansen U., Büttgenbach S.
Technical University of Braunschweig, DE

Keywords: MEMS data model, MST CAD, process compatibility, process configuration

Conventionally the design of a product is conducted paying only little attention to the subsequent manufacturing. Regarding micromechanical devices this is not practicable, since the design choices taken are highly dependent on the technology used for fab

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 586 - 589
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4