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HomeKeywordsUV-depth lithography

Keywords: UV-depth lithography

Novel synchronous linear and rotatory micro motors based on polymer magnets with organic and inorganic insulation layers

Feldmann M., Waldschik A., Büttgenbach S., Institut for Microtechnology (IMT), DE
Electromagnetic micro actuators have reached a growing interest in micro technology in addition to commercial applications during the last years. Their basic construction exists of electric conductors and coil systems as well as of soft-magnetic [...]

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