two-movable parallel plate – TechConnect Briefs

Design of the Two-Movable Plates Type MEMS Voltage Tunable Capacitor

Kim Y., Lee S-G, Park S., Kyungpook National University, KR

In this paper, we have proposed and designed the new structure of a RF-MEMS voltage tunable capacitor, which have two-movable parallel plates using electrostatic method and can be fabricated by the MEMS technology. Capacitance of [...]