TMAH – TechConnect Briefs

Silicon Nanostructure Fabrication by Direct FIB Writing and TMAH Wet Chemical Etching

Sievilä P., Chekurov N., Tittonen I., Aalto University, FI

The development of nanotechnology based devices requires rapid prototyping methods that can be applied in combination with well-known clean room processing techniques. We show that focused ion beam (FIB) Ga+-ion implantation can be used to [...]

Computer Aided Mask-Layout for Bulk Etch Fabrication

Long M.K, Burdick J.W., Antonsson E.K., California Institute of Technology, US

This paper presents a method to synthesize the mask layout geometry for a MEMS wet etching process. Given a desired part geometry, the method determines a candidate mask geometry that will etch to the final [...]