Micromechanical GaAs Thermal Convertor for Gas Sensors
Jakovenko J., Lalinsky T., Drzík M., Vanko G., Czech Technical University in Prague, Faculty of Electrical Engineering, CZ
This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. [...]