template assisted nanosphere lithography

Periodic Nanowell Array using Template-Assisted Nanosphere Lithography

Jung S., Lee J., Seoul National University, KR

This paper presents a template-assisted nanosphere lithography(NSL) to obtain high-quality crystal in regularity and coverage(Figure 1). A periodic array of 100-nm deep, 360-450 nm wide nano-trenches was fabricated by nano imprint lithography(NIL), and used as [...]