surface micromachining – TechConnect Briefs

A Novel Silicon-based Wideband Nano Switch for RF Applications

Yang Y.X., Ramer R., University of New South Wales (UNSW), AU

This paper presents, for the first time, a silicon-based wideband RF nano switch with simulation fabrication measurement and analysis. Port-to-port simulation results of the RF nano switch indicate that the designed switch has a potential [...]

Fabrication and analysis of MEMS test structures for residual stress measurement

Sharma A., Kaur M., Bansal D., Kumar D., Rangra K., Central Electronics Engineering Research Institute (CEERI/ CSIR), IN

A set of microstructures for in situ stress measurement is presented. It is based on lancet principle, with dedicated design for the amplification of the dimensional variations induced by the internal stress of the structural [...]

Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements

You J., Packirisamy M., Stiharu I., Concordia University, CA

In general, this paper presents the deduced analytical model and numerical simulation of electrostatically actuated torsional micromirrors with two symmetrical side springs of multiple rotational serpentine elements. Modelling of these kinds of micromirrors is carried [...]

Coupling Of Resonant Modes In Micromechanical Vibratory Rate Gyroscopes

Phani A.S., Seshia A.A., Palaniapan M., Howe R.T., Yasaitis J., University of Cambridge, UK

Analytical models are presented to describe the resonant modal coupling behaviour of z-axis micromechanical vibratory rate gyroscopes fabricated in an integrated polysilicon surface micromachining process. The models are then applied to predict the extent of [...]

Nano-bending Method to Identify the Residual Stresses of MEMS Films

Kim J.G., Kim J.H., Kim Y.H., Kim J.G., Kim J.H., Kim Y.H., Hahn J.H., Lee H.Y., Kim J.G., Kim J.H., Kim Y.H., Seoul National University, KR

Surface micro-machined MEMS frequently suffer from the residual stress which might significantly decrease the performance and reliability of micro devices. It is important to accurately measure the residual stresses at manufacturing step. The Stoney’s equation [...]

Performance Limits of Micromachined Tunable-Cavity Filter

Moon J-S., Shkel A., University of California Irvine, US

This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges [...]