silylation – TechConnect Briefs

Silylation Hardening for Mesoporous Silica Zeolite Film

Kikkawa T., Hiroshima University, JP

Pure silica zeolite films were prepared for ultra-low-k interlayer dielectrics in ultra-large integrated circuits by both hydrothermal crystallization using tertabuthylammonium hydroxide, tetraethylorthosilicate and ethylalcohol, and vapor phase transport synthesis using ethylene diamine and triethylamine. Self-assembled [...]

A Fully Coulpled Computational Model of the Silylation Process

Winters W.S., Evans G.H., Prantil V.C., Larson R.S., Sandia National Laboratories, US

This paper describes a fully coupled computational model of the positive tone silylation process. The model is two-dimensional and transient and focuses on the part of the lithography process in which crosslinked and uncrosslinked resist [...]