A Piezoelectric Micro-Cantilever Bio-Sensor Using the Mass-Micro-Balancing Technique with Self-Excitation
A new bio-sensor was developed in order to use in a LOC(Lab-On-a-Chip). The sensor detects the change in the resonance frequency of a micro cantilever with a piezoelectric film(PZT). This is the so-called mass micro-balancing [...]