SE – TechConnect Briefs

Measuring System Mass and Density of MEMS by Electronic Probing

Chigullapalli A., Purdue University, US

In this paper we propose a method to measure the system mass and material density of a common type of micro electromechanical systems (MEMS). Measurement can be done on- or off-chip.To examine the feasibility of [...]

Optical Properties of Silicon Nanocrystals Embedded in SiO2 Matrix

Ding L., Chen T.P., Liu Y., Nanyang Technological University, SG

In this work, spectroscopic ellipsometry (SE), which is a nondestructive method, is employed to determine the optical constants (refractive index and extinction coefficient) and thus the dielectric functions of the isolated nc-Si with a mean [...]