Electrostatic Tuning of a Micro-Ring Gyroscope
Gallacher B.J., Hedley J., Burdess J.S., Harris A.J., Rickard A., King D., Insat University of Newcastle, UK
This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [...]