process-design – TechConnect Briefs

Methodology and tool support for micro- and nano product engineering for SMEs

Hahn K., Ortloff D., Mielke M., Brueck R., University Siegen, DE

The development of micro and nano tech devices such as MEMS (micro-electro-mechanical systems) and NEMS (nano-electro-mechanical systems) based on semiconductor manufacturing processes comprises the structural design as well as the definition of the manufacturing process [...]

Design and multiobjective optimization of a novel reactive extrusion process for the production of nanostructured PA12/ PDMS blends

Pla F., Rached R., Hoppe S., Fonteix C., Nancy University, FR

The important demand of innovative materials implies the development of new processes and concepts for their design and optimization. This work deals with the manufacture, by reactive extrusion, of Polyamide 12 (PA12)/ Polydimethylsiloxane (PDMS) nanostructured [...]

Computer-Based Process Design Support for MEMS

Wagener A., Popp J., Schmidt T., Hahn K., University of Siegen, DE

A process management and development system for MEMS design is introduced. It allows the specification of processes for specific applications and the tracking of the development procedures. Unlike in microelectronics the process configuration for MEMS [...]

Robust Ion-Implantation Process Design through Statistical Analysis

Sudhama C., Thoma R., Morris M., Christiansen J., Lim I-S., Motorola Digital DNA Labs, US

In this work, for the first time, we present a TCAD methodology to rigorously account for statistical variations due to these random process errors (inherent in all semiconductor processes), and thereby design a robust ion-implantation [...]