piezoresistivity – TechConnect Briefs

Parallel Fabrication of Single-Walled Carbon Nanotube based Piezoresistive Pressure Sensors

Burg B.R., Helbling T., Hierold C., Poulikakos D., ETH Zürich, CH

A major obstacle in the realization of commercially viable single-walled carbon nanotube (SWNT) based devices, hindering the functionality of this uniquely interesting type of material, is their type and site selective integration. In this work, [...]

Increased Piezoresistive Effect in Crystalline and Polycrystalline Si Nanowires

Reck K., Richter J., Hansen O., Thomsen E.V., Technical University of Denmark, DK

This paper presents measurements of the size and doping dependence of the piezoresistive effect in top-down fabricated p-type crystalline and polycrystalline silicon nanowires. Test chips with 6 differently sized piezoresistors and integrated contacts for electrical [...]

Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications

Gupta A., Bashir R., Neudeck G.W., McElfresh M., Purdue University, US

This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with [...]