piezoelectric thin film – TechConnect Briefs

Piezoelectric actuators, next driver for MEMS market?

Fanget S., Casset F., Nicolas S., Dieppedale C., Allain M., Desloges B., Le Rhun G., CEA-LETI, FR

Over the past three decades, huge progresses have been made in MEMS technologies. Hundreds millions of MEMS, principally: accelerometers, gyroscopes and microphones, are commercialized yearly. This should continue to increase with upcoming new applications related [...]

Electrical equivalent circuit for air and liquid characterization of a multilayer micromembrane with piezoelectric actuation and read-out capabilities

Alava T., Ayela C., Nicu L., Laboratory for Analysis and Architecture of systems LAAS-CNRS, FR

In the field of piezoelectric-based resonators, micromembranes have revealed substantial advantages especially for biosensing experiments. To ease the design of new-membrane-based biosensors, an analytical model is crucial. We have elaborated such a model for the [...]