PDMS bonding – TechConnect Briefs

Vapor-assisted bonding of poly(dimethylsiloxane) and silicon-based substrates

Sofla A.Y.N., Martin C., University of Toronto, CA

We present a novel method to reliably bond PDMS to glass, Si, SiO2 and PDMS. In this vapor-assisted method the surface of the PDMS is first brought into contact with the substrate. The PDMS-substrate structure [...]

A Line Force Model to Measure the Strength of Polydimethylsiloxane (PDMS)-to-PDMS Bonding in Blister Tests

Lin P-T, Lu Y-W, Rutgers University, US

Bonding is an important technique in microelectronics and Microelectromechanical Systems (MEMS). Especially, bonding two pieces of polydimethylsiloxane (PDMS) to make micro devices was widely used in micro actuators and BioMEMS. The PDMS bonding, however, lacked [...]