micromirror – TechConnect Briefs

New Designs for MEMS-Micromirrors and Micromirror Packaging with Electrostatic and Piezoelectric Drive

Gu-Stoppel S., Stenchly V., Kaden D., Quenzer H.-J., Wagner B., Hofmann U., Dudde R., Fraunhofer Institute Silicon Technology, DE

New devices of 1 and 2dimensional micro-mirrors based on new designs and new process capabilities using piezoelectric actuators are presented. For micro-mirrors an 8’’ wafer-level packaging process was developed using pre-processed borosilicate glass wafers. An [...]

Analysis and Simulation of Curved Bimorph Microactuators

Pal S., Xie H., University of Florida, US

Difference in strains in the two layers of a bimorph causes it to curl, thereby leading to actuation. Thermal, piezoelectric and shape-memory alloy based straight bimorph actuators have been widely reported. However, little attention has [...]

Dynamic Compact Thermal Model of an Electrothermal Micromirror Based on Transmission Line Theory

Pal S., Xie H., University of Florida, US

The two main challenges in electrothermal MEMS design are their slow response and inherently low efficiency. Therefore, thermal modeling is essential for design and optimization. A compact parametric model is desirable as it computationally efficient [...]

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

Haris M., Qu H., Jain A., Xie H., Oakland University, US

This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare. [...]

Modeling and Dynamic Simulation of Electrostatically Driven Micromirror

Kweon S., Lee H., Shin H., Samsung Electronics Co.Ltd., US

Dynamic behavior of the electrostatically driven bi-directional micromirror system was simulated with ANSYS parametric design language. The objective of the study is to construct a dynamic simulation scheme for the transient properties of electrostatically coupled [...]

Micromirror Array Design and Simulation

Huja M., Husak M., Czech Technical University in Prague, CS

The main objective of the research described is to design optimal principle of micromirror array and its manufacturing technology with maximum penentration of the reflected/non-reflected part of micromirror array using standard, easily available and cheap [...]

Analysis of Unstable Behavior Occurring in Electro-Mechanical Microdevices

König E-R, Wachutka G., Münich University of Technology, DE

We analyze the instability which is inherent to electrostatically driven microdevices. Further, we propose a homotopy method to overcome this difficulty during simulation of these devices. Starting from a simplified model, the governing differential equations [...]