micro valve – TechConnect Briefs

Design of a normally closed piezoelectric micro valve

Zähringer S., Menacher M., Kirchner P., Schwesinger N., Technische Universitaet Muenchen, DE

In a previously published paper a piezoelectric actuator using surface electrodes was investigated in a macro-microscopic approach. Bases on those results a normally closed piezoelectric micro valve was devoloped. Therefore the electrode structures were minimized [...]

Novel Electro Magnetic Micro Pump

Feldmann M., Demming S., Büttgenbach S., Institute for Microtechnology, DE

The mergence of partial aspects and functional components of micro actuators and micro fluidic technology allows the development of complex micro systems. This enormous potential is shown in this article by the realization of an [...]