MEMS – Page 20 – TechConnect Briefs

Device Characterization at the Wafer Level via Optical Actuation and Detection

Hedley J., Burdess J.S., Harris A.J., Gallacher B.J., Newcastle University, UK

This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an [...]

Novel Monolithic Micro Droplet Generator

Chung C.K., Lin C.J., Chen C.C., Chuang S.W., Fang Y.J., Hong Y.Z., National Cheng Kung University, TW

A novel monolithic off-shooter droplet generator has been demonstrated. The design, fabrication, bubble formation and droplet injection are described here. It is different from the conventional droplet generators of top-shooter, side-shooter and back-shooter for injection. [...]

A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications

Paranjpye A., MacDonald N.C., Beltz G.E., university of california, santa barbara, US

A two-dimensional laminar composite material has been shown to exhibit enhanced damage tolerance due to zones of residual compressive stress. The damage tolerance appears as a threshold stress below which the structure does not fail [...]

Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process

Tuantranont A., Lomas T., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH

This paper discusses the design, fabrication and testing of a 5x5 micromachined tactile sensor array for the detection of an extremely small force (micrometer-Newton range). Central contacting pads that are trampoline-shape suspended structures and sensor [...]

Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process

Tuantranont A., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH

Micromachined thermal multimorph actuators for out-of-plane displacements have been designed and fabricated by Multi-Users MEMS Process (MUMPs) with a post-processing bulk etching step. Micromachined actuators have potential applications in microtransducers such as scanning tunneling microscope [...]

Keywords: MEMS

Device Characterization at the Wafer Level via Optical Actuation and Detection

Novel Monolithic Micro Droplet Generator

A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications

Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process

Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process

A MEMS Tunable Inductor

MEMS Biofluidic Device Concept Based on a Supramolecular Motor

PEM Fuel Cells

MEMS Fabrication Modeling with ChISELS: A Massively Parallel 3-D Level-Set Based Feature Scale Modeler

A Novel Simulation Methodology for Isotropic Gas Phase Etching