MEMS – Page 13 – TechConnect Briefs

Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) for Acoustic Detection

Sun Y., Feng G., Georgiou G., Padron I., Niver E., Noe K., Chin K.K., New Jersey Institute of Technology, US

The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot has been designed and fabricated with Micro-electric mechanical system(MEMS) technology. The DFOS utilizes a diaphragm as the sensing element to detect static and dynamic pressure [...]

MEMS Humidity Structure with Cantilever – Simulation of Behaviour

Suchanek P., Husak M., Czech Technical University in Prague, CZ

The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezorezistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend [...]

A Novel Topology Optimization Scheme for Micro Electro-Thermo-Mechanical Domains

Motiee M., Khajepour A., Mansour R.R., University of Waterloo, CA

Developing a systematic approach to design optimum Micro-Electro-Mechanical Systems MEMS, recently has received a numerous attention among researchers. Duo to the lack of a systematic design method, typical MEMS devices design procedures encompass trial and [...]

Development of Materials and Sensors for the U.S. Army’s Active Coatings Technology Program

Zunino III J.L., U.S. Army ARDEC, US

The ability to custom build and integrate novel technologies into functionalized systems is the driving force towards the creation and advancement of active coatings systems. Active coating systems require the development and advancement of numerous [...]

Design and Characterization of new GaAs Micromechanical Thermal Converter developed for Microwave Power Sensor

Jakovenko J., Husak M., Lalinsky T., Czech Technical University in Prague, Faculty of Electrical Engineering, CZ

In this report we demonstrate the design of new GaAs based Micromechanical thermal converter (MTC) that creates heart of the RF power sensor microsystem. Transmitted power is the main quantity measured in RF systems. The [...]

Modeling and Dynamics of Coupled Dome-shaped Micromechanical Oscillators

Sahai T., Zehnder A.T., Cornell University, US

In this work we analyze a feasible approach for constructing coupled micromechanical oscillators that synchronize. For this purpose we use dome shaped micro-oscillators that have previously been used to build radios. These oscillators are fabricated [...]

Frequency Domain Modeling of SAW Devices

Wilson W.C., Atkinson G.M., NASA Langley Research Center, US

The lack of integrated design tools for MEMS devices in general, and for Surface Acoustic Wave (SAW) devices specifically, has led to the development of tools that will enable integrated design, modeling, simulation, analysis and [...]

New Analysis Method for Coupled-Field Micro Devices

Motiee M., Khajepour A., Mansour R.R., University of Waterloo, CA

MEMS actuators are typically used for either one time deployment of structures for automatic assembly or constant periodic actuation as in case of micro optic scanners. Electro-thermal actuators rely on the joule heating resulting small [...]

A Silicon Ultrasonic Imager Probe for Minimally Invasive Diagnosis

Chen J.K., Chen S-Y, Cheng X., Lin P., Cheng X., Liu J-H, Chen J.K., Chen S-Y, Cheng X., Li P-C, Lin P., Liu J-H, Xerox Corp, US

This paper reports the development of a miniaturized ultrasonic transducer array for minimally invasive medical imaging. This probe shape ultrasonic transducer array is smaller than a human hair. Due to its miniature size, this array [...]

MEMS Sensors for Harsh Environment Applications

Nieva P.M., University of Waterloo, CA

Micro Electro Mechanical Systems (MEMS) for harsh environment applications are becoming increasingly important. They are recognized as essential for reducing weight and volume in strategic market sectors such as automotive, aerospace, turbomachinery, oil well/logging equipment, [...]