MEMS simulation – TechConnect Briefs

Modeling and simulation of organic MEM relay for estimating the coefficient of thermal expansion of PEDOT:PSS

Khan N.Z., Rutgers University, US

PEDOT:PSS is becoming a popular transparent electrode material for organic electronic and optoelectronic devices, replacing the more commonly used Indium Tin Oxide (ITO). PEDOT: PSS has good conductivity, transparency, superior electrical and thermal stability and [...]

Design and Verification of an Electrostatic MEMS Simulator

Bognar G., Rencz M., Ciontu F., Charlot B., Courtois B., Micred, HU

Thermal solvers can be used for the simulation of electro-static problems as well, since the main equations to be solved are the same: the so-called field equation. There are numerous thermal solvers on the market, [...]

System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models

Kurzweg T.P., Levitan S.P., Davare A.J., Kahrs M., Chiarulli D.M., University of Pittsburgh, US

The creation of simulation tools for mixed-signal, multi-domain (MSMD) systems is challenging because these systems span the physical domains of electronics, photonics, fluidics, and mechanics, as well as multiple orders of magnitude in both time [...]

System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models

Kurzweg T.P., Levitan S.P., Davare A.J., Kahrs M., Chiarulli D.M., University of Pittsburgh, US

The creation of simulation tools for mixed-signal, multi-domain (MSMD) systems is challenging because these systems span the physical domains of electronics, photonics, fluidics, and mechanics, as well as multiple orders of magnitude in both time [...]

Resonant-Type Micro-Probe for Vertical Profiler

Lebrasseaur E., Bourouina T., Pourcie J-B., Ozaki M., Masuzawa T., Fujita H., LIMMS/CNRS-IIS, JP

We present a characterization method, which is dedicated to the measurement of the inner dimensions of high aspect ratio micro-holes, typically 100mm in diameter and 1mm in depth. Micro-probes with an integrated force-sensitive element are [...]

Simulation of Grating Light Valves

Furlani E., Eastman Kodak Co., US

The Grating Light Valve (GLV) is a microelectromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In this paper we discuss a method for simulating GLVs. This method entails the solution of [...]