MEMS gyroscopes – TechConnect Briefs

Experimental results for a parametrically excited micro-ring resonator

Harish K.M., Gallacher B.J., Burdess J.S., Neasham J.A., University of Newcastle upon Tyne, UK

This paper reports experimental results for a parametrically excited micro-ring resonator. Actuation and sensing are performed electrostatically thus making the scheme suitable for many vibratory sensors. The equation of motion for the electrostatically actuated MEMS [...]

Identification of Anisoelasticity and Nonproportional Damping in MEMS Gyroscopes

Phani A.S., Seshia A.A., University of Cambridge, UK

A novel approach to identify nonproportional damping and structural anisoelasticities in vibratory MEMS gyroscopes is proposed in this paper. The proposed identification method is based on measured vibration data in the form of frequency response [...]