mask generation – TechConnect Briefs

A New, Topology Driven Method for Automatic Mask Generation from Three-Dimensional Models

Schiek R., Schmidt R., Sandia National Laboratories, US

We have developed an algorithm which when given a three-dimensional object can infer from the objects topology the two-dimensional masks needed to produce that object with surface micromachining.Our algorithm, called Faethm, calculates the required two-dimensional [...]

Voxel-Based Heterogeneous Geometric Modeling for Surface Micromachined MEMS

Perrin A., Ananthakrishnan V., Gao F., Sarma R., Ananthasuresh G.K., University of Pennsylvania, 220 S. 33rd Street, US

A heterogeneous geometric modeler for microeletromechanical systmes (MEMS) is the focus of this paper. ON the basis of a comprehensive formalism describe in our earlier work, we present a 3-F implementation of the forward (from [...]