inertial sensors. – TechConnect Briefs

Design and Modeling of a 3D Micromachined Accelerometer

Ghafari S.H., Golnaraghi M.F., Mansour R., University of Waterloo, CA

This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor [...]

A Design Approach for Robustness Improvement of Rate Gyroscopes

Acar C., Shkel A., University of California Irvine, US

This paper reports a design concept for robustness improvement of micromachined gyroscopes. The novelty of the approach is in expanding the design space of the device by increasing the degrees-of-freedom (DOF) of the system. The [...]

System Level Simulation of an Electrostatically Levitated Disk

Kraft M., Evans A., University of Southampton, UK

This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As [...]

Hierarchical Representation and Simulation of Micromachined Inertial Sensors

Vandemeer J.E., Kranz M.S., Fedder G.K., Carnegie Mellon University, US

A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems (MEMS) is presented. In the NODAS methodology 2dal Design of Actuators and Sensors), microaccelerometers and microgyroscopes are designed as [...]