ICP – TechConnect Briefs

Multiscale Biomechanical Modeling of the Human Eye

Karampelas I.H., Furlani E.P., Nunez A., Vizzeri G., State University of New York at Buffalo, US

The human eye is a complex organ consisting of multiple different tissues with varying mechanical properties and functionality. Hence, there are many aspects of the biomechanical behavior of the eye that are not understood. In [...]

Synthesis of Nanopowders and Their Production at the Industrial Scale Using the Inductively-Coupled Plasma Technology

Dolbec R., Bolduc M., Fan X., Guo J., Jurewicz J., Xue S., Boulos M., Tekna Plasma Systems Inc., CA

The increasing demand for nanopowders (particles size

Inverse RIE Lag of Silicon Deep Etching

Chung C.K., Chiang H.N., National Cheng Kung University, TW

This paper reports for the first time that the phenomena and reaction mechanism of inverse reactive ion etching (RIE) lag occurs in the silicon deep RIE process without feature coalescence. This phenomenon is related to [...]

Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process

Lin C.H., Chen H-R, Du C-H, Fang W., National TsingHua University, TW

A 2.45GHz filter is fabricated by thin film bulk acoustic wave resonator (FBAR) technology. Especially, it is designed to minimize die size and to simplify fabrication process simultaneously by using inductive coupling plasma etching. The [...]