Substrate Current Simulations at Elevated Temperatures
Lyumkis E., Mickevicius R., Polsky B., Loechelt G., Zlotnicka A., Thoma R., Integrated Systems Engineering, Inc., US
We report results of hydrodynamic simulations and measurements of substrate currents in submicron MOSFET. Both simulations and measurements show anomalous dependence of the substrate current on lattice temperature, which is consistent with previously published experimental [...]