humidity – TechConnect Briefs

A New Concept for Humidity Sensing Using Curved Micro-beams

Ouakad H.M., Hasan M.H., Alsaleem F.M., University of Nebraska Lincoln, US

There are number of common humidity sensing methods in MEMS. They include capacitive, resistive, and thermal methods. Among these methods, capacitive sensing is considered the most common in MEMS. In this method, changes of a [...]

A new humidity sensor based on the effect of water content on a capacitive MEMS oscillator’s thermo-electrical characteristics

Alsaleem F., University of Nebraska Lincoln, US

Accurate humidity measurement is essential in commercial and industrial applications such as HVAC systems and microelectronics manufacturing. Typical humidity sensors suffer from degradation over time, consume a relatively high amount of power, and have limited [...]

Ultrafast Integrated Humidity and Temperature Sensor Based on Carbon Nanotubes, and a Sensor Controller System

Kayastha V., Gibbons S., Giedd R., Brewer Science, Inc, US

A flexible, resistive-type, integrated humidity and temperature sensor that is made of carbon nanotubes (CNTs) will be presented. The sensor resolution is ~1% for relative humidity and <0.5°C for temperature. The sensor response and settling [...]

Novel Nanostructures for Solid State Alcohol Breath Analyzers

Tricoli A., Righettoni M., Pratsinis S.E., Swiss Federal Institute of Technology, CH

Solid state alcohol breath analyzers are commonly used by the law enforcement authorities, due to high sensitivity toward ethanol, their portability and fair response and recovery times. Common materials for the synthesis of the sensitive [...]

Anodic aluminum oxide-based capacitive humidity sensor integrated with micro-heater

Kim Y.D., Jung B.B., Lee H.K., Lee K.H., Lee H.K., Lee K.H., Park H.C., Pohang University of Science and Technology, KR

AAO(Anodic Aluminum Oxide) film is fabricated as a sensing material of capacitive humidity sensors. Because AAO films have a lot of nano-size pores, many water vapors can be absorbed. The size of a pore diameter [...]

Anodic aluminum oxide-based capacitive humidity sensor integrated with micro-heater

Kim Y.D., Jung B.B., Lee H.K., Lee K.H., Lee H.K., Lee K.H., Park H.C., Pohang University of Science and Technology, KR

AAO(Anodic Aluminum Oxide) film is fabricated as a sensing material of capacitive humidity sensors. Because AAO films have a lot of nano-size pores, many water vapors can be absorbed. The size of a pore diameter [...]

MEMS Humidity Structure with Cantilever – Simulation of Behaviour

Suchanek P., Husak M., Czech Technical University in Prague, CZ

The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezorezistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend [...]