high aspect ratio – TechConnect Briefs

Characterization of an ultra high aspect ratio electron beam resist for nano-lithography

Lewis S., Jeanmaire D., Haynes V., Piccirillo L., The University of Manchester, UK

The performance of a new electron beam resist called SM20L-15 for use in electron beam lithography has been investigated. It was found that the clearing dose of this resist was 1025uC/cm2. The result is that [...]

Digital Matrix Corp

Derrig L., Kuzmin A., Digital Matrix Corp, US

Electroless and Electrolytic plating has had to keep up with the demands in developing new technologies to meet the needs of filling nano and micro structures. Requirements have been for plating angstrom thin layers with [...]

Design Optimization of Micromachined High Aspect Ratio 3D On-Chip Solenoid Inductor

Chomnawang N., Lu H., Colinjivadi K., Lee J., University of Texas at Dallas, US

We report the simulation work done by using Sonnet EMÔ on high aspect ratio (1:4 and 1:8) 3D on-chip air-core solenoid inductors. Simulations on 2, 3, and 5-turn inductors with 200 and 400 mm high [...]

Low Damping Differential-Capacitive Sensing Comb

Yeon S.C., Jeon Y.K., Kim Y.H., Seoul National University, KR

In the present study, a specially designed sensing comb is proposed for low damping and high capacitance. Many researchers have proposed high aspect ratio single crystal silicon structure to improve sensitivity in capacitive sensing and [...]