helium ion microscopy – TechConnect Briefs

Maskless Lithography of Nanometer-Scale Circuit Structures in Supported, Single-Layer Graphene Using Helium Ion Microscopy

Rondinone A., Iberi V., Matola B., Linn A., Joy D., Oak Ridge National Laboratory, US

Here we will discuss the utility of scanning helium ion lithography for fabricating conducting graphene structures that are supported directly by silicon oxide. The lithography is performed in a single step, dry, using high-resolution He- [...]

Advances in Helium Ion Microscopy for High Resolution Imaging and Material Modification

Thompson W., Notte J., Scipioni L., Ananth M., Stern L., Sijbrandij S., Sanford C., Carl Zeiss SMT, US

The helium ion microscope routinely obtains sub-nanometer resolution on uncoated soft materials with a high signal to damage ratio. In addition to its high resolution imaging capability, the microscope has been successful at sub-nanometer film [...]