Germanium antimony sulphide nano wires fabricated by chemical vapour deposition and e-beam lithography
Germanium antimony sulphide (Ge-Sb-S) amorphous thin films and nano wires have been directly deposited and patterned on SiO2-on-silicon substrates by means of chemical vapour deposition, e-beam lithography and dry etching. The Ge-Sb-S thin films were [...]