frequency tuning – TechConnect Briefs

Frequency Tuning of Micro-beams using Electrostatic Pull-in

Burdess J.S., Harris A.J., Kafumbe S., University of Newcastle, UK

The work reported shows how the frequency of vibration of simple beam structures can be changed significantly through the action of electrostatic pull-in. The application of a voltage between the beam and a supporting, but [...]

MEMS Resonator Tuning using Focused Ion Beam Platinum Deposition

Enderling S., Jiang L., Ross A.W.S., Bond S., Hedley J., Harris A.J., Burdess J.S., Cheung R., Zorman C.A., Mehregany M., Walton A.J., University of Edinburgh, UK

This paper presents a novel post-fabrication tuning method which changes the resonant frequency of micromechanical beam resonators using Focused Ion Beam (FIB) deposition and removal of platinum. Tuning was achieved by depositing platinum on a [...]